光刻机硅片表面不平度原位检测技术

随着光刻特征尺寸的不断减小,硅片表面不平度对光刻性能的影响越来越显著.该文提出了一种新的硅片表面不平度的原位检测技术本文在分析特殊测试标记成像规律的基础上,讨论了测试标记的对准位置偏移量与硅片表面起伏高度的变化规律,提出了一种新的硅片表面不平度原位检测技术.实验表明,该技术可实现硅片表面不平度及硅片表面形貌的高准确度原位测量.该技术考虑了光刻机承片台吸附力的非均匀性对硅片表面不平度的影响,更真实反映曝光工作状态下的硅片表面不平度大小.与现有的原位检测方法相比,硅片表面不平度的测量空间分辨率提高了1.67%倍,可实现硅片表面形貌的原位检测.     

光学平面绝对检验方法的研究

应用两种方法对三个高精度平面进行了测试。第一种方法是Fritz的三面互检法,它利用Zernike多项式的特性拟合三个面四次组合测量得到的干涉图,然后求出三个面的Zernike多项式系数,从而得到三个面的面形偏差。第二种方法是奇偶函数法,根据函数的奇偶性,把平面的面形函数分解为四类:偶奇、奇偶、偶偶和奇奇函数,分别求出各分量,从而得到三个面的三维面形偏差。对两种方法都编制了理论模拟和实测程序,并进行了实验,实现了无参考面的高精度平面面形测试。     

替代法测量微安表内阻的不确定度分析

在测量微安表内阻的众多方法中,替代法是最简单的方法。本文全面分析了影响测量结果不确定度的因素,求出了实验测量的最佳条件,计算了普通仪器组合下测量结果的相对不确定度。     

Broadband Analysis of Holographic Power Combining Circuits

Holography is a promising technique for power combining applications in the frequency range of short millimeter and submillimeter waves. In this paper, quasi-optical holographic power combining circuits are investigated. An equivalent network is utilized which rigorously models horn arrays and biperiodic dielectric structures in order to design computer-generated holograms. We apply the network model to a 5-element quasi-optical power combiner and demonstrate its capability. The hologram is designed for 150 GHz and has an efficiency of 92.5 % with a 90 % bandwidth of 5.3 %. With the aid of a broadband waveguide power divider and a vector field measurement system, the circuit is analyzed.     

Simultaneous Measurement of Particle Size and Particle Velocity by the Spatial Filtering Technique

The objective of this study was to compare the measuring results of a fiber‐optical probe based on a modified spatial filtering technique with given size distributions of different test powders and also with particle velocity values of laser Doppler measurements. Fiber‐optical spatial filtering velocimetry was modified by fiber‐optical spot scanning in order to determine simultaneously the size and the velocity of particles. The fiber‐optical probe system can be used as an in‐line measuring device for sizing of particles in different technical applications. Spherical test particles were narrow‐sized glass beads in the range 30–100 μm and irregularly shaped test particles were limestone particles in the range 10–600 μm. Particles were dispersed by a brush disperser and the measurements were carried out at a fixed position in a free particle‐laden air stream. Owing to the measurement of chord lengths and to the influence of diffraction and divergent angle, the probe results show differences from the given test particle sizes. Owing to the particle‐probe collisions, the mean velocity determined by the probe is smaller than the laser Doppler mean velocity.     

利用莫尔条纹的准正弦特性的三维轮廓术

分析了两个矩形光栅迭合产生的莫尔条纹的光强分布特性，通过选择适当的光栅参数，可得到一个近似的正弦分划板，并把它用于三维面形测量中，实验结果表明，这种方法简单，易于自动处理，有广泛的实用价值。     

Multivariate Gini Indices

Two extensions of the univariate Gini index are considered:R_D, based on expected distance between two independent vectors from the same distribution with finite meanμ ^d; andR_V, related to the expected volume of the simplex formed fromd+1 independent such vectors. A new characterization ofR_Das proportional to a univariate Gini index for a particular linear combination of attributes relates it to the Lorenz zonoid. TheLorenz zonoidwas suggested as a multivariate generalization of the Lorenz curve.R_Vis, up to scaling, the volume of the Lorenz zonoid plus a unit cube of full dimension. Whend=1, bothR_DandR_Vequal twice the area between the usual Lorenz curve and the line of zero disparity. Whend>1, they are different, but inherit properties of the univariate Gini index and are related via the Lorenz zonoid:R_Dis proportional to the average of the areas of some two-dimensioned projections of the lift zonoid, whileR_Vis the average of the volumes of projections of the Lorenz zonoid over all coordinate subspaces.     

电磁继电器触点参数的测试

本文介绍了电磁继电器触点电参数的测试方法，包括接触电阻、绝缘电阻参数测试。     

气相色谱仪的技术指标测算方法

通过对气相色谱各项技术指标及意义的介绍，使应用者娴熟地掌握气相色谱的各项技术指标和测算方法，正确的表达分析检测结果。